Optoelectronic Material and Element Manufacturing Industry Air Pollution Control and Emission Standards Article 3
These Standards shall apply to stack emissions in the optoelectronics industry; the controlled air pollutant items are VOCs, hydrofluoric acid, and hydrochloric acid.
中文原文 光電材料及元件製造業空氣污染管制及排放標準第3條
本標準適用於光電業之煙道排氣，管制空氣污染物項目為揮發性有機物、氫氟酸及鹽酸。