Air Pollution Control and Emissions Standards for the Semiconductor Industry Article 6
The recording, preservation and declaration of VOCs, trichloroethylene, nitric acid, sulfuric acid, hydrochloric acid, phosphoric acid, hydrofluoric acid, etc., shall meet the following requirements:1. Air pollutant input volume (volume added to processes as a solvent or in other forms), output volume (volume leaving processes with waste solvent, waste, wastewater or in other forms), pollution prevention and control equipment reduction quantity and other data shall be recorded on a monthly basis.2. When the pollution prevention and control equipment is an acid-alkali washing and absorption facility, service and maintenance matters shall be recorded, and the washing cycle water volume and pH value of each washing tank shall be recorded on a daily basis.3. When the pollution prevention and control equipment is a water washing and absorption facility, service and maintenance matters shall be recorded, and the washing cycle water volume andwastewater discharge rate of each washing tank shall be recorded on a daily basis.4. When the pollution prevention and control equipment is a condenser, condensate volume shall be recorded monthly, and condenser outlet temperature shall be recorded daily.5. When the pollution prevention and control equipment is a biological treatment facility, service and maintenance matters shall be recorded to ensure that the state of the facility is suitable for biological growth and metabolism, and the volume of gas treated, inlet temperature and outlet relative humidity shall be recorded on a daily basis.6. When the pollution prevention and control equipment is a thermal incinerator, combustion temperature shall be recorded on a daily basis.7. When the pollution prevention andcontrol equipment is a catalytic incinerator, the type of catalyst and the catalytic bed replacement date shall be recorded, and the catalytic bed inlet and outlet gas temperatures shall be recorded on a daily basis.8. When the treatment is carried out using other pollution prevention and control equipment, service and maintenance matters shall be recorded, and chief operating parameters shall be recorded on a daily basis.9. When flowmeters and concentration monitors are required, the flow and concentration monitoring results shall be corrected based on the last testing results to calculate the discharge reduction rate and the discharge volume, and the hourly average and daily average shall be recorded on a daily basis.10. Records under the preceding nine paragraphs shall be kept in electronic form for reference for at least six years, and records of the previous quarter shall be submitted to the local competent authorities by the end of January, April, July and October each year in a format required by the central competent authority. The competent authority may adjust the contents and frequency of such submissions when appropriate.
中文原文 半導體製造業空氣污染管制及排放標準第6條
揮發性有機物、三氯乙烯、硝酸、硫酸、鹽酸、磷酸、氫氟酸等之紀錄、保存與申報規定如下：
一、空氣污染物輸入量（以溶劑或其他型式輸入製程之量）、輸出量（隨廢溶劑、廢棄物、廢水或其他型式輸出製程之量）、污染防制設備削減量等資料應每月記錄。
二、污染防制設備為酸鹼洗滌吸收設施者，應記錄保養維護事項，並每日記錄各洗滌槽洗滌循環水量及pH值。
三、污染防制設備為清水洗滌吸收設施者，應記錄保養維護事項，並每日記錄各洗滌槽洗滌循環水量及廢水排放流量。
四、污染防制設備為冷凝器者，應每月記錄冷凝液量及每日記錄冷凝器出口溫度。
五、污染防制設備為生物處理設施者，應記錄保養維護事項，以確保該設施之狀態適合生物生長代謝，並每日記錄處理氣體風量、進口溫度及出口相對濕度。
六、污染防制設備為熱焚化爐者，應每日記錄燃燒溫度。
七、污染防制設備為觸媒焚化爐者，應記錄觸媒種類、觸媒床更換日期，並每日記錄觸媒床進、出口氣體溫度。
八、以其他污染防制設備處理者，應記錄保養維護事項，並每日記錄主要操作參數。
九、應設置流量計及濃度監測器者，其流量及濃度監測結果應根據前次比測結果修正後計算排放削減率及排放量，並每日記錄小時平均值及日平均值。
十、前九款之紀錄需以電子化方式保存備查至少六年，並依中央主管機關規定之格式於每年一、四、七、十月月底前向當地主管機關申報上一季之紀錄。
主管機關得適時調整申報內容及頻率。
一、空氣污染物輸入量（以溶劑或其他型式輸入製程之量）、輸出量（隨廢溶劑、廢棄物、廢水或其他型式輸出製程之量）、污染防制設備削減量等資料應每月記錄。
二、污染防制設備為酸鹼洗滌吸收設施者，應記錄保養維護事項，並每日記錄各洗滌槽洗滌循環水量及pH值。
三、污染防制設備為清水洗滌吸收設施者，應記錄保養維護事項，並每日記錄各洗滌槽洗滌循環水量及廢水排放流量。
四、污染防制設備為冷凝器者，應每月記錄冷凝液量及每日記錄冷凝器出口溫度。
五、污染防制設備為生物處理設施者，應記錄保養維護事項，以確保該設施之狀態適合生物生長代謝，並每日記錄處理氣體風量、進口溫度及出口相對濕度。
六、污染防制設備為熱焚化爐者，應每日記錄燃燒溫度。
七、污染防制設備為觸媒焚化爐者，應記錄觸媒種類、觸媒床更換日期，並每日記錄觸媒床進、出口氣體溫度。
八、以其他污染防制設備處理者，應記錄保養維護事項，並每日記錄主要操作參數。
九、應設置流量計及濃度監測器者，其流量及濃度監測結果應根據前次比測結果修正後計算排放削減率及排放量，並每日記錄小時平均值及日平均值。
十、前九款之紀錄需以電子化方式保存備查至少六年，並依中央主管機關規定之格式於每年一、四、七、十月月底前向當地主管機關申報上一季之紀錄。
主管機關得適時調整申報內容及頻率。