Air Pollution Control and Emissions Standards for the Semiconductor Industry Article 3
These Standards shall apply to the Semiconductor manufacturing industry. However, the substance in question shall not be subject to these Standards when the annual consumption of raw materials (supplies) of the Semiconductor manufacturing industry is less than the amount listed in the following table:Article 3.pdf
中文原文 半導體製造業空氣污染管制及排放標準第3條
（因條文排版無法完整呈現內容，請詳閱完整條文檔案）本標準適用於半導體製造業。
但半導體製造業原（物）料年用量小於下表所列者，該項物質不適用本標準之規定：
但半導體製造業原（物）料年用量小於下表所列者，該項物質不適用本標準之規定：